System features |
---|
name; Reno-Coater2 |
Size; 3600Ø X 4500mm |
Weight; 38ton |
Sud. Holder; Rotation |
Main Drum; 2200mm |
Pump System; RP + BP + Cryo |
Compressor; 12ea |
Ultimate Pressure; 5 x 10-6 torr |
Working Pressure; 1 x 10-4 torr |
Roll Moving Speed: Max 25m/min |
Gas system: Ar + O2 |
Gas Flow: MFC 0~3000 |
6 Cathode Possible |
6 Target Sputtering Possible once |
Heating; ~150℃ |
Cryo-Cooler Temp: -165℃ |
Ion Beam Source hold; 4ea |
System features |
---|
Name; Reno-Coater1 |
Size; 1600Ø X 2500mm |
Weight; 13ton |
Sud. Holder; Rotation |
Main Drum; 2200mm |
Pump System; RP + BP + Cryo |
Compressor; 12ea |
Ultimate Pressure; 5 x 10-6 torr |
Working Pressure; 1 x 10-4 torr |
Roll Moving Speed: Max 25m/min |
Gas system: Ar + O2 |
Gas Flow: MFC 0~3000 |
3 Cathode Possible |
3 Target Sputtering Possible once |
Heating; ~150℃ |
Cryo-Cooler Temp: -165℃ |
Ion Beam Source hold; 4ea |