Reno-Coater2
| System features |
|---|
| name; Reno-Coater2 |
| Size; 3600Ø Ｘ 4500mm |
| Weight; 38ton |
| Sud. Holder; Rotation |
| Main Drum; 2200mm |
| Pump System; RP + BP + Cryo |
| Compressor; 12ea |
| Ultimate Pressure; 5 x 10-6 torr |
| Working Pressure; 1 x 10-4 torr |
| Roll Moving Speed: Max 25m/min |
| Gas system: Ar + O2 |
| Gas Flow: MFC 0~3000 |
| 6 Cathode Possible |
| 6 Target Sputtering Possible once |
| Heating; ~150℃ |
| Cryo-Cooler Temp: -165℃ |
| Ion Beam Source hold; 4ea |
Reno-Coater3
| System features |
|---|
| Name; Reno-Coater1 |
| Size; 1600Ø Ｘ 2500mm |
| Weight; 13ton |
| Sud. Holder; Rotation |
| Main Drum; 2200mm |
| Pump System; RP + BP + Cryo |
| Compressor; 12ea |
| Ultimate Pressure; 5 x 10-6 torr |
| Working Pressure; 1 x 10-4 torr |
| Roll Moving Speed: Max 25m/min |
| Gas system: Ar + O2 |
| Gas Flow: MFC 0~3000 |
| 3 Cathode Possible |
| 3 Target Sputtering Possible once |
| Heating; ~150℃ |
| Cryo-Cooler Temp: -165℃ |
| Ion Beam Source hold; 4ea |
